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The INFICON Compact Pirani Gauges, TPR280 and TPR281, employ the most advanced
digital Pirani technology available in the marketplace. The rugged stainless steel sensor
cell and compact design qualify them for use on semiconductor systems and for standard
applications, such as fore vacuum lines.
ADVANTAGES
Easy push button ATM and HV adjustment
Space saving rugged design
Aluminium housing
Mounts in any orientation
Stainless steel measuring cell with metal-sealed feedthrough
Logarithmic signal output for easy integration
10 bar absolute overpressure with threaded connections
250 °C bakeable version
Nickel filament option for corrosive applications
APPLICATIONS
Controlling high vacuum ionization gauges
Fore vacuum pressure monitoring
Safety circuits in vacuum systems
General vacuum measurement and control in the fine and rough vacuum range
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