SEM / TEM 主動式直流&交流磁場干擾消除器環境量測及改善解決方案：
場地量測工具：
SC11 Analysis System - Sensor Interface
主動式交流磁場干擾消除器：
SC22 Magnetic Field Cancelling System
主動式交直流磁場干擾消除器：
SC20 Magnetic Field Cancelling System
主動式交流磁場消除器：
SC20FAST Magnetic Field Cancelling System
§ Protects your investment in electron beam technology by stabilising the magnetic field environment
§ Cancels and monitors the field
§ Simple “set and forget” operation
§ Adapts to field changes within 100 μs
§ AC or DC field sensors
§ AC field cancelling from 0.5 Hz to 5 kHz 50 x field improvement at 60Hz （typ）
§ DC field cancelling from DC to 5 kHz 200 x field improvement at DC
§ Full 3 axis （X, Y, Z） system
§ Up to 80 mG （8.0 μT） pk-pk cancelling range
§ Supports multiple sensors for TEMs and CD metrology tools , Network monitoring option
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| Overview |
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| § Today’s high performance electron beam tools are very sensitive to changing ambient magnetic fields. The fields move the beam causing loss of resolution and measurement accuracy. The SC20 system stabilises the ambient field and restores the resolution and accuracy. § The SC20 system comprises a Magnetic Field Control Unit, one or two AC or DC Magnetic Field Sensors and three multicore cables which are installed in the room where the field is to be cancelled. The Control Unit power amplifiers drive currents through the cables to create a field which is the opposite sign to the changes in the ambient field. The magnetic field sensors measure the resulting field and real time negative feedback reduces the ambient field by the loop gain of the system. § The system is dynamic, automatically responding to field changes within 100 μs. Line fields （50/60 Hz） are reduced by 50 x and DC fields by 200 x. |
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