ÐÏࡱá>þÿ ')þÿÿÿ&ÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿì¥Á)` ðR¿bjbj€€2â{â{Œÿÿÿÿÿÿ¤ÐÐÐÐÐÐÐäìììì ø äÓ ò: < < < < < < $Å h- œ` -Ð` ÐЍ    ÐÐ: :  ÐÐ  ÀKj ¿Ðì : £ 0Ó É É  âÉ Ð 8 ` ` Ó äääD(Ääää(äääÐÐÐÐÐÐÿÿÿÿ EPPOÿÞ˜)Rfm ÿl/.•øv!jWW„vÂSpe N} ·_ýVEPRO×e N§NÁT;N‰ g ÿEPRO OahV ÿEPROl OahV ÿEPRO5u¨R¿R OahV ÿEPROMOûy OahV0EPRO/c¨R OahV0EPRO€Øš)n/c¨R OahV0EPRO5u¡mAm OahV0EPROt/c OahV0EPROíp¨À€ OahV0EPROØShV0EPROlØShV0EPROt/c¨RØShV0EPROlØShV0EPROl/.•øvØShV0EPROtMOûyØShV0EPRO!jWW0EPRO¯‹!jWWI{§NÁT0 EprolQøS ŸSeg/fwƒpQÞ˜)RfmlQøS(W‰·_„vN*Nå]‚S ÿú^ŽN1970t^ ÿ1992t^b:NìrËz„vlQøS01994t^v^-†NÞ˜)Rfm}ln:gÑvKmÝO¤bû|ß~‹NNè ÿƒ[ç~b†NÞ˜)RfmlQøS(WËel:g°hÝO¤b†˜ßWïy/}peASt^„v[5Ï~ŒšåNÊSňY¾|o‚„vu§N¾‹½e ÿ$\vQ/fÞ˜)RfmYt^ùW²€„vDñmN¶[åNÊSM^hQt„v•.UÊS€b/g g¡RQÜ~0v^(WdkúW@x N ÿ_ÑSbŸR°eNãN}ln:gÑvKmÝO¤bû|ß~ÿMMS60000 EPPOÿÞ˜)Rfm ÿl/.•øv!jWW„vyr¹pÿ ÌSSlKmÏ‘!jWW ÿÑvKmt„vËel¦^0 ïS(WЏLˆ-Nôfbc ÿïSUSìrO(u ÿ—QYO5un“eQ0 ibU\„vêÀhŸRý€ ÿ…Qn OahVêÀhŸRý€ ÿãSäNÝO¤bÍd\O§~0 (u¡mAm OahVPR642./..û|R RMRnhVCON0X1 ÿb€PR9376/.. OahV0 5u”–»y„v5uAm“úQ0 RS232/485ïzãS(uŽN°s:WÄ~`ÊS¯‹ ÿïSû‹úQKmÏ‘f@wM–NOy˜îvb,g0dkY ÿlQøS؏ý€'Y'Y)íwû|ß~•beQЏLˆöeô• ÿÎN €hQb—žX:_ON8hÃ_‰N›R0.^©R¢[7bÐcØšu§N›RŒT)íw•bDÞV¥b„vhTg ÿ¾0R§NHegOS„vÓ~T0 ß~N„vÄ~`ŒT z ÿß~N„vpenc¡{tŒTß~N„v¯‹ ÿž[°s†Nte*N§NÁTƒôV„vØš¦^Æ–b0OS@b gèöNô•„vøv’Nq_ÍT ÿïSåNOON°s g„v\oý€—_0Rg'YP–¦^„v)R(u0ÐcؚꁨRSû|R„vu§N›R ÿ Töe_NÐcØš†NÄ~`å] z^0 z^XT0Íd\OXTåNÊS g¡RºNXTå]\OHe‡s  ÐcØš)R¦m„v\o›RàeP–ÿ ,glQøSåN O(§NÁT ÿO( g¡R ÿåN¢[:NHQ"„v—[èe ÿ:N¢[7bÐc›OŸSňck‚S„vO(§NÁT ÿåNTt„v'`÷NÔk ÿë_wc„v¤N'g ÿípÅ`hT0R„v g¡R ÿ:N¢[7bÐc›OØšÁT(0Ï~Nm€(u0ÁTÍyPŸhQ„v§NÁT ÿÎN €b—_¢[7b„vNô^ObìN\ N¢[7bù[,glQøS„vggŒTšS1r ÿªR›R:N^'Y¢[ 0182P°‚. °ÆA!°"°# $ %°°S°à ©†œN@ñÿN ck‡e $1$a$$CJKHPJ_HaJmH nHsH tH$A@òÿ¡$ Øž¤‹µk=„W[SOBi@óÿ³B nfhˆ*S*€Y(ph"W@¢" Ž8‰¹p5\ŒÿÿÿÿÕ…š®Äß 3Ht†›¼ëù'»Ñ—ŽÈ‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€È‘0€˜0€€»Ñ—Žš@0€€È‘0DÈÈ‘0€È‘0€˜0€€0 ‹Ž [RoÑ\Ut]ÄR–ìc[![RoÀõj õj  r5¤DDo:?qð@ r5AÃCo:¤DD„Xˆm MJÁyUñF.Pìc[!t]ÄRAÃCÒÒÁyUÑ\U„XˆmñF.PåÓ<Ž84ShxZlFwžÅ­fSÅÜoöÿ@€‹‹ôEÑ‹‹(Œ`` `ÿÿUnknownÿÿÿÿÿÿÿÿÿÿÿÿG‡z €ÿTimes New Roman5€Symbol3& ‡z €ÿArial;†‹[SOSimSun 1ˆ¤hºz7g„7‡Ó¹ Ó¹ !-!),.:;?]}¨·ÇÉ    & 6"0000 0 0 00000ÿÿÿ ÿ ÿÿÿÿÿ=ÿ@ÿ\ÿ]ÿ^ÿàÿ([{·  0 0 00000ÿÿ;ÿ[ÿáÿåÿ ´œ‚€ŠŠ2ƒQHX ðÿ?¨ÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿ4Sh2ÿÿ1BURKERT[·_0331‹W5uÁx–-NýVãNhˆYBURKERT[·_0331‹Wl¨RTˆÁ”5uÁx–:N•^g‰[ň_UserUserþÿà…ŸòùOh«‘+'³Ù0¸˜ðü $8 HT t € Œ˜ ¨°¨PBURKERT±¦µÂ0331Ð͵ç´Å·§Öйú´ú±í´¦BURKERT±¦µÂ0331ÐÍת¶¯ÏÎÌúµç´Å·§Îªµ×°å°²×°Ê½User Normal.dotUser6Microsoft Office Word@FÃ#@l ª¾Ð@~ØX ¿ÐÓ¹þÿÕÍÕœ.“—+,ù®0¸ X`x€ˆ ˜ ¨°¨ÐÅÄî¼¼ÊõÂÛ̳ Š'  þÿÿÿþÿÿÿþÿÿÿ !"#$%þÿÿÿýÿÿÿ(þÿÿÿþÿÿÿþÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿRoot Entryÿÿÿÿÿÿÿÿ ÀF Áj ¿Ð*€1TableÿÿÿÿÿÿÿÿWordDocumentÿÿÿÿÿÿÿÿ2SummaryInformation(ÿÿÿÿDocumentSummaryInformation8ÿÿÿÿÿÿÿÿÿÿÿÿCompObjÿÿÿÿÿÿÿÿÿÿÿÿmÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿþÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿÿþÿ ÿÿÿÿ ÀFMicrosoft Office Word Îĵµ MSWordDocWord.Document.8ô9²q